基于等离子体增强原子层沉积栅极绝缘层的氧化锡基薄膜晶体管及制备方法与流程 Template




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tomski基于等离子体增强原子层沉积栅极绝缘层的氧化锡基薄膜晶体管及制备方法与流程 coloring